Design of a Piezoresistive Micropressure Sensor using Finite Element Analysis
نویسندگان
چکیده
منابع مشابه
Design of a Piezoresistive Micropressure Sensor using Finite Element Analysis
This paper is about designing a silicon based piezoresistive micro pressure sensor for greater sensitivity. Using Finite Element Analysis (FEA) the role played by important design parameters like the side length and the thickness of the pressure sensing membrane in determining the sensitivity of the sensor are studied in detail for a pressure of 100 kPa. The fracture stress of silicon is adopte...
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ژورنال
عنوان ژورنال: International Journal of Computer Applications
سال: 2013
ISSN: 0975-8887
DOI: 10.5120/11943-7745